YihexingDust-free ovenEquipped with a HEPA filter to keep the cavity free of particles. HEPA filters are now the primary filtration system for electronics and flat panel display cleanroom assemblies, or any application requiring the reduction or removal of sub-micron particles. HEPA filters feature randomly positioned microglass A deep bed of fibers, where the total bed depth (thickness of the filter) is very large compared to the average fiber diameter and the effective pores of the free path cross-section.
The channel through which the gas passing through the HEPA filter has to flow is not straight, but very tortuous. As the particles affect and stick to the fibers, the channel becomes smaller and the efficiency of the filter increases. Dust-free oven These filters are used in special conveying ovens for the LCD industry as well. To protect the filters from overheating in the oven, a special protection system for the filters is implemented. The HEPA filter maintains its efficiency in the oven under normal conditions from one to Years. HEPA does not require any cleaning or maintenance to maintain this efficiency. CleanDust-free ovenMainly used for pretreatment baking of silicon wafer, gallium arsenide, lithium niobate, glass and other materials in semiconductor manufacturing before gluing, hard film baking after gluing and high temperature baking after development; also suitable for electronic liquid crystal display , LCD, CMOS, IS, pharmaceutical, laboratory and other production and scientific research departments.
YihexingClean and dust-free ovenFeatures
1. It is assembled from the box body, electrical control cabinet, electric heating and air duct circulation system, and the structure is reasonable.
2. The HEPA filter screen is constructed in a clean room, 99.99 percent effective filtration, and the cleanliness reaches class 100.
3, Data coupling with PC can be provided, which allows long-term data storage as well as statistical process control SPC, recipe management and process visualization.
4. Forced air circulation mode, double air duct circulation structure, uniform temperature field distribution, intelligent PID temperature control system, so as to obtain high-precision temperature control.
5. Intelligent production requirements can be realized. SECS\/GEM is a semiconductor device interface protocol for device-to-host data communication. In an automated factory, the interface can start and stop device processing, collect measurement data, change variables and select recipes for products .
