Oxygen-free oven, is to create a drying equipment with low oxygen content in the cabinet and heating and baking. It is mainly used for anti-oxidation protection when baking, drying and curing for some metal and other relatively easy-to-oxidize devices. We all know that semiconductor manufacturing can be subdivided. There are two process steps: front and back. The front process is to process silicon materials into wafers, and load the IC design pattern onto the wafer through multiple processes such as lithography exposure to make integrated circuits; The first process is to divide the wafer carrying integrated circuits into basic units, and then package and test the integrated circuit products. In the oxygen-free oven, the partial pressure of oxygen is reduced in the vacuum environment of oxygen-free differentiation, which avoids the drying of materials. The oxidative deterioration in the process ensures the quality of the dried products, and has the characteristics of complete functions, good baking effect, convenient use and easy operation, which is more suitable for the semiconductor industry than ordinary ovens.
Jardine SemiconductorOxygen-free ovenHas the following characteristics:
1. The control system uses PLC plus human-machine interface and microcomputer to control the temperature controller, with PID automatic calculation function to ensure that the temperature uniformity of the box is ±1 degrees Celsius.
2. The inner material is made of SUS304 stainless steel, and the entire inner cavity is fully welded with argon arc welding to prevent air from entering the oven and save inert gas;
3. The outer material is SPCC steel plate, which has been cleaned with soda water and then treated with powder baking paint. The thermal insulation material is high-density fiber cotton, which has a good thermal insulation effect.
4. The upper and lower furnace chambers can be individually controlled for temperature, ventilation, alarm protection, and forced air circulation to ensure uniform temperature.
5. Equipped with automatic nitrogen filling device, and automatic opening and closing damper for nitrogen filling and baking;
6. You can save recipes, view temperature curves, export heating data, etc.;
7, according to the requirements of use, can accept customization.
