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Dust-free oven for precision semiconductor clean workshop

Dust-free oven for precision semiconductor clean workshop

The clean and dust-free oven is suitable for pretreatment baking before coating of silicon wafers, gallium arsenide, lithium niobate, glass and other materials in semiconductor manufacturing, hard film baking after coating and high temperature baking after development; also suitable for Electronic liquid crystal display, LCD, CMOS, IS, medicine, laboratory and other production and scientific research departments; it can also be used for drying, heat treatment, aging and other high temperature tests of non-volatile and non-flammable and explosive materials.
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Product Details

Product description


FeaturesPRODUCT FEATURES

1. SUS304 1.5mm stainless steel plate, full welding process;

2. The air duct in the box is equipped with a clean air inlet and a high-efficiency filter. Ventilation and non-ventilation modes can be used to ensure a slight positive pressure in the box to ensure that pollutants cannot enter the inner box;

3. The high efficiency filter HEPA filter is constructed in a clean room, which can perform one-way filtering and circulating filtering of the gas in the box. According to the requirements of use, it can meet the requirements of various levels of cleanliness such as ISO Class 5 (national standard 100), ISO Class 6 (national standard 1000), ISO Class 7 (national standard 10000);

4. Equipped with an automatic nitrogen filling device, which can be used for nitrogen filling and baking with the automatic opening and closing damper;

5. Newly developed touch screen operating system, with high-precision PID main controller, temperature control accuracy of ±0.1℃, automatic constant temperature. You can save recipes, view temperature curves, export temperature rise data, etc.;

7. Optional accessories

①Multi-point temperature measurement, viewing and recording function; ②Oxygen content analyzer; ③Network function; ④HEPA high efficiency filter; ⑤Quick cooling system

6. According to the requirements of use, customization can be accepted.

Core configurationCORE CONFIGURATION

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