In the semiconductor production process, lithography is an important process link in the transfer of integrated circuit patterns. The quality of glue coating directly affects the quality of lithography, and the glue coating process is also particularly important. Most of the photoresists in the photoresist coating process It is hydrophobic, while the hydroxyl groups and residual water molecules on the surface of the silicon wafer are hydrophilic, which results in poor adhesion between the photoresist and the silicon wafer, especially the positive photoresist. The developer will invade the photoresist and silicon wafer during development. It is easy to cause drift strips, floating glue, etc., resulting in the failure of lithography pattern transfer, and at the same time, wet etching is prone to lateral corrosion. After HMDS is applied to the surface of the wafer, it can be reacted with siloxane after being heated in an oven. The main compound is a surfactant, which successfully changes the surface of the silicon wafer from hydrophilic to hydrophobic, and its hydrophobic group can be well combined with the photoresist, acting as a coupling agent.Dust-free ovenIt reduces the contact angle of silicon wafers after HMDS treatment, reduces the amount of photoresist, and improves the adhesion between photoresist and silicon wafers. Suitable for silicon wafers, gallium arsenide, ceramics, stainless steel, lithium niobate, glass, sapphire , Wafer and other material pretreatment and related industries.
Dust and Oxygen Free OvenFeatures:
1. Forced air circulation mode, double air duct circulation structure, uniform temperature field distribution, intelligent PID temperature control system, so as to obtain high-precision temperature control.
2. The air duct in the box is equipped with a clean air inlet and a high-efficiency filter. Two methods of ventilation and no ventilation can be used to ensure a slight positive pressure in the box and ensure that pollutants cannot enter the inner box;
3. Intelligent production requirements can be achieved. SECS\/GEM is a semiconductor device interface protocol for device-to-host data communication. In an automated factory, the interface can start and stop device processing, collect measurement data, change variables and select recipes for products .
